TRANSPARENT CONDUCTIVE ITO COATINGS OBTAINED BY PYROLYSIS OF METAL EXTRACTS | Journal of Applied...

Pyrolysis of liquid organic extracts of indium and tin resulted in the formation of thin films of indium-tin oxide (ITO). In an atmospheric environment, the films were deposited on a glass substrate. The extraction-pyrolytic process used here is inexpensive and produces the needed stoichiometric ratio by combining stable liquid precursors in sufficient concentrations. Thermal breakdown reactions are induced in the 350–400°C temperature range. To ensure homo epitaxial development, the zirconium-yttrium oxide (ZYO) sublayer was pre-deposited on the glass substrate. Due to the matching of thermal expansion coefficients with ITO film, this would result in a reduction in intrinsic stress of the films. XPS tests revealed the absence of impurity elements in these extraction-pyrolytic process produced ITO films, and the spectrum is very close to those of vacuum-deposited ITO films. ITO film has a nanocrystalline structure with grains of 6 nm in size.

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